太赫兹频段波导滤波器的研究进展

太赫兹波因其独特的频谱特性，在天文观测、星际通信、国防安全等领域有着重要的交叉前沿应用。滤波器作为太赫兹探测/通信系统中关键器件之一，能够提取特征信号并抑制干扰频率，提高系统的目标探测性能。近年来，得益于高精确度制备工艺的快速发展，太赫兹波导滤波器的研究进展已取得突破性成果，基于不同类型、结构、工艺的太赫兹波导滤波器被深入研究。该综述从太赫兹频段加工工艺方面入手，阐述了太赫兹频段波导滤波器的发展现状和普遍问题，并总结了主流工艺下滤波器的优缺点，为太赫兹高性能波导滤波器的进一步发展提供参考。

Review of terahertz waveguide filters research process

Terahertz waves with unique spectrum characteristics have provided important applications in cross frontier fields of astronomical observation, interstellar communication and defense security. As one of the key components in the terahertz detection/communication systems, the filter can extract characteristic signals and suppress interference frequencies to improve the target detection performance of the system. In recent years, thanks to the development of the high-precision manufacturing process, some breakthrough results have been achieved in terahertz waveguide filters. And the filters based on different types, structures and processes have been studied. In this review paper, the development status and common problems of terahertz waveguide filters are expounded based on the different processes. The advantages and disadvantages of filters developed by mainstream technologies are also summarized, which can provide a reference for the further development of terahertz waveguide filters with high performance.