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Tantalum Thin-Film Superconducting Transition Edge Thermometers
Authors:Masoud Mohazzab  Norbert Mulders  Al Nash  Melora Larson
Affiliation:(1) Department of Physics and Astronomy, University of Delaware, Newark, DE, 19716;(2) Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, 91109
Abstract:Sputter deposited Ta thin films make excellent superconducting transition edge temperature sensors. Depending on film thickness, their transition temperature, Tc, ranges from 4.4K to as least as low as 0.5K. A figure of merit of 50K1 is easily achieved. The films are mechanically extremely strong, and at room temperature show minimal aging. Using a simple heat treatment technique, Tc can be tuned to the desired operating range.
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