大位移测量的容栅传感器工作原理

从理论上分析了容栅传感器的工作原理及其理论非线性误差，提出了了较为合理的等效电路和理论非线性误差表达式，容栅传感器是一种相位跟踪型位移传感器，对输入信号的幅值变化不敏感，具有较好的抗干扰能力，容栅传感器的原理非线性误差与小发射极宽度正比，为减小非线性误差，在工艺条件允许的情况下，应尽可能减小小发射极的宽度。

The Analysis on the Principle of the Capacitive Grate Transducer for Measuring of Large Displacement

In this paper, the principle of the capacitive grate transducer for large displacement is analyzed, and more reasonable equivalent circuit and formula of theoretic nonlinear error are presented. As a phase-modulated displacement transducer, it is insensitive to the amplitude changing of the input voltage signal, thus it possesses better capacibility for anti-disturbance. Its theoretical nonlinear error is directly proportional to the width of the small emitter. In order to reduce this error, the width of the small emitter should be reduced to the highest possible allowed by manufacturing technique.