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Sensor guided handling and assembly of active micro-systems |
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| Authors: | S. Büttgenbach J. Hesselbach R. Tutsch M. Berndt B. Hoxhold K. Schöttler |
| Affiliation: | (1) Institute For Microtechnology, TU Braunschweig, Langer Kamp 8, 38106 Braunschweig, Germany;(2) Institute of Machine Tools and Production Technology, TU Braunschweig, Langer Kamp 19 B, 38106 Braunschweig, Germany;(3) Institute of Production Measurement Technology, TU Braunschweig, Schleinitzstraße 23, 38106 Braunschweig, Germany |
| Abstract: | Positioning accuracies in the range of a few micrometers and below are necessary for the assembly of active micro-systems. In order to reach these accuracies, an assembly system for sensor guided micro-assembly is developed in the Collaborative Research Centre 516 “Design and manufacturing of active micro-systems”. The combination of a parallel robot with an integrated 3D vision sensor and a micro-gripper enables to reach relative positioning accuracies below 1 μm. |
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