| 真空阴极电弧沉积法沉积类金刚石膜在扬声器振膜上应用的研究 |
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| 引用本文： | 谢致薇,郑健红.真空阴极电弧沉积法沉积类金刚石膜在扬声器振膜上应用的研究[J].广东有色金属学报,1998,8(1):52-56. |
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| 作者姓名： | 谢致薇 郑健红 |
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| 作者单位： | 广州有色金属研究院 |
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| 基金项目： | 中国有色金属工业总公司高新技术课题 |
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| 摘 要： | 采用真空阴极电经反沉积技术，在纯钛球顶高音声声器振膜上镀类金刚石膜，为成类金刚石／钛复合振膜。研究了钛基体的材质、厚度、振膜的几何尺寸和形状、类金刚石镀膜工艺参数对复合振膜性能的影响。在镀膜过程中采用特殊的辅助夹具以及合理的遮挡技术，保证振膜不变形和最佳的类金刚石膜层厚度分布，使类金刚石／钛复合振膜的频响达到３０ｋＨｚ，并且能实现批量生产。
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| 关 键 词： | VCAD 类金刚石膜 扬声器 振膜 |
STUDY ON APPLICATION OF DLC FILMSDEPOSITED BY VCAD METHOD ON LOUDSPEAKER DIAPHRAGM |
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| XIE Zhiwei,ZH EN G Jianhong,YUAN Zhenhai,DEN G Qisen,L UO Guangnan,DAI Dahuang,FU Zhiqiang.STUDY ON APPLICATION OF DLC FILMSDEPOSITED BY VCAD METHOD ON LOUDSPEAKER DIAPHRAGM[J].Journal of Guangdong Non-Ferrous Metals,1998,8(1):52-56. |
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| Authors: | XIE Zhiwei ZH EN G Jianhong YUAN Zhenhai DEN G Qisen L UO Guangnan DAI Dahuang FU Zhiqiang |
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| Abstract: | DLC films have been deposited on the loudspeaker diaphragm of pure Ti by means of vacuum cathodic arc deposition to produce DL C/Ti composite diaphragm.Inf- luence of the material quality and thickness of Ti substate,the appearance of diaphragm and deposition parameters of DL C films on properties of the composite diaphragm have been studied.The application of special clamping tools and proper sheltering technology during deposition can assure a non- deformable diaphragm and an optimum thickness distribution of DLC films.As a result,the frequency respondence of DLC/Ti composite diaphragm can reach30 k Hz,and the diaphragms are capable of being produced in batches. |
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| Keywords: | vacuum cathodic arc deposition DL C film loudspeaker diaphragm |
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