环境湿度下硅材料表面的粘滑行为及其抑制

通过自行开发的微摩擦测试仪,分别研究了小载荷湿度环境下光洁硅片、物理形貌修饰表面和OTS膜修饰表面的微摩擦行为。实验结果表明,OTS膜表面和凹坑形貌修饰表面在高湿度环境下可以有效地抑制粘滑现象的发生。通过对湿度环境下液桥作用机制的研究,初步认为摩擦力来自于工作间隙的固固、固液和液液3个接触面间相互作用,并且高湿度下是否出现粘滑现象取决于这3种界面间力的竞争关系。

Control of Stick-slip Phenomenon on Silicon Interface under Relative Humidity Conditions

The micro friction behaviors of clean silicon surface,dimpled surface and OTS film were investigated in the situations of micro load and various relative humidity levels by a laboratory-made micro-tribotester.Results show that OTS film and dimpled surface can prevent the presence of stickslip phenomenon at high relative humidity levels compared to bare silicon surfacce.With the theoretically study of the effect of liquid bridge on friction under relative humidity conditions,it can be primarily concluded that the friction force consists of three shearing forces coming from the solid-solid,solid-liquid and liquid-liquid interfaces.Furthermore,the appearance of the stick-slip phenomenon depends on the competing relationship between the three shearing forces.