Scanning tunneling microscope combined with scanning electron microscope |
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| Affiliation: | 1. Univ. Artois, EA 4515, Laboratoire de Génie Civil et géo-Environnement (LGCgE), Béthune F-62400, France;2. IMT Lille Douai, Univ. Lille, EA 4515 – LGCgE – Laboratoire de Génie Civil et géoEnvironnement, département Génie Civil & Environnemental, F-59000 Lille, France;1. Department of Chemistry, North University of China, Taiyuan, Shanxi 030051, China;2. Key Laboratory of Advanced Energy Materials Chemistry (Ministry of Education), Nankai University, Tianjin 300071, China;3. Materials Fabrication and Processing Division, Institute of Metal Research, Chinese Academy of Science, Shenyang 110016, China;1. School of Chemical Engineering and Technology, Tianjin University, Tianjin 300350, China;2. Collaborative Innovation Center of Chemical Science and Engineering, Tianjin 300072, China;3. Max Planck Institute for Polymer Research, Ackermannweg 10, 55128 Mainz, Germany;4. Department of Chemistry, Key Laboratory of Advanced Energy Materials Chemistry (Ministry of Education), Nankai University, Tianjin 300071, China;1. Department of Chemistry, Moscow State University, Leninskie gory 1-3, 119992 Moscow, Russia;2. National University of Science and Technology “MISIS” (MISiS), Leninskiy prospekt 4, 119049 Moscow, Russia |
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| Abstract: | A scanning tunneling microscope (STM) has been installed in a usual scanning electron microscope (SEM) with a vacuum of 10−6 Torr. The STM image is displayed on the cathode ray tube of the SEM, 512 × 512 pixels, with a scanning rate of 80 s/picture. The spatial resolution of the STM is about 1 Å, while that of the SEM is several tens of ångströms. The combined scanning microscope covers a wide magnification range from 10 to 107, where STM covers the high magnification region from 105 to 107. |
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