| 微反射镜和光纤自对准V型槽的制作 |
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| 引用本文： | 董玮,阮圣平,张歆东,刘彩霞,张龙,纪平,潘建旋,贾翠萍,陈维友. 微反射镜和光纤自对准V型槽的制作[J]. 微细加工技术, 2002, 0(4): 66-69,74 |
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| 作者姓名： | 董玮 阮圣平 张歆东 刘彩霞 张龙 纪平 潘建旋 贾翠萍 陈维友 |
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| 作者单位： | 吉林大学电子科学与工程学院集成光电子学国家重点实验室,长春,130023 |
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| 基金项目： | 国家自然科学基金资助项目 (6 99370 10 )，吉林省科学计划发展项目 (2 0 0 10 319) |
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| 摘 要： | 用纯KOH水溶液和KOH +IPA混合水溶液在 ( 1 0 0 )硅片上沿 <1 0 0 >方向上腐蚀所暴露的平面是不同的。纯KOH水溶液中总是能暴露与衬底垂直的 {1 0 0 }面 ,在KOH +IPA溶液中 ,随着KOH的浓度不同将暴露 {1 1 0 }和 {1 0 0 }面。使用KOH浓度为 50 %的KOH +IPA溶液 ,在 ( 1 0 0 )硅片上一次掩模制作微反射镜和光纤自对准V型槽 ,微镜的表面粗糙度低于 1 0nm。
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| 关 键 词： | 微反射镜 光纤 自对准V型槽 制作 KOH溶液 KOH＋IPA溶液 氢氧化钾 光开关 |
| 文章编号： | 1003-8213(2002)04-0066-04 |
Fabrication of Reflective Micromirror and Fiber Self-aligned V-grooves |
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| DONG Wei,RUAN Sheng ping,ZHANG Xin dong,LIU Cai xia,ZHANG Long,JI Ping,PAN Jian xuan,JIA Cui ping,CHEN Wei you. Fabrication of Reflective Micromirror and Fiber Self-aligned V-grooves[J]. Microfabrication Technology, 2002, 0(4): 66-69,74 |
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| Authors: | DONG Wei RUAN Sheng ping ZHANG Xin dong LIU Cai xia ZHANG Long JI Ping PAN Jian xuan JIA Cui ping CHEN Wei you |
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| Abstract: | The different crystal faces are produced when the(100) silicon wafer is etched in the <100> direction in th pure aqueous KOH or the mixed aqueous KOH+IPA. The {100} face which is vertical to the substrate is always produced when the wafer is etched in the pure aqueous KOH. When the wafer is etched in KOH+IPA the {110} or {100} face will be produced depending on the concentration of KOH. Using the KOH+IPA solution with 50% concentration of KOH and a one level mask, the reflective micromirror and fiber self aligned V grooves are fabricated on the (100) silicon wafer. The measured surface roughness of the micromirror is below 10nm. |
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| Keywords: | KOH solution KOH+IPA solution reflective micromirror surface roughness |
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