| 铁基体等离子体增强磁控溅射离子镀Ti－TiN涂层的组织结构 |
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| 引用本文： | 王玉魁,王传恩,张兴龙,韩会民,高路斯.铁基体等离子体增强磁控溅射离子镀Ti－TiN涂层的组织结构[J].材料热处理学报,1995(2). |
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| 作者姓名： | 王玉魁 王传恩 张兴龙 韩会民 高路斯 |
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| 作者单位： | 大连理工大学 |
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| 基金项目： | 三束材料改性国家重点实验室资助项目 |
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| 摘 要： | 利用等离子体增强磁控溅射离子镀（ＰＥＭＳＩＰ），先在铁基体上镀一层很薄的钛中间层，继之沉积ＴｉＮ。对膜层进行俄歇电子能谱（ＡＥＳ）分析和透射电镜（ＴＥＭ）分析。结果表明，膜与基体之间有厚约５０ｎｍ的过渡层；膜基界面处有ＦｅＴｉ相；中间层与后继膜交接处Ｔｉ２Ｎ与α－Ｔｉ有取向关系。
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| 关 键 词： | 等离子体增强，磁控溅射，过渡层，TiN，FeTi |
Microstructures of Ti-TiN Coating Deposited on iron Substrate by Plasma Enhanced Magnetron Sputtering Ion Plating |
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| Wang Yukui,Wang Chuanen,Zhang Xinglong,Han Huimin,Gao Lusi.Microstructures of Ti-TiN Coating Deposited on iron Substrate by Plasma Enhanced Magnetron Sputtering Ion Plating[J].Transactions of Materials and Heat Treatment,1995(2). |
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| Authors: | Wang Yukui Wang Chuanen Zhang Xinglong Han Huimin Gao Lusi |
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| Affiliation: | Dalian university of Technology |
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| Abstract: | A thin Ti layer was first coated as an intermediate layer on the iron substrate,and then followed by TiN layer by means of plasma enhanced magnetron sputtering ion plating. The coatings have been investigated by means of Auger electron petroscopy(AES)and transmission electron micraseopy (TEM). The results indicate that there exists a transition layer with a thickness of about 50nm in the interface between the coating and the substrate, and there is FeTi phase in the interface.The crystallographic orientation relationship between a-Ti and Ti2N in the contacting area of Ti intermediate layer with the following TiN coating has been observed. |
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| Keywords: | plasma enhance magnetron sputtering transition layer TiN FeTi |
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