| 微机械电容式加速度计检测电路设计 |
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| 引用本文： | 石云波,王玲,刘俊.微机械电容式加速度计检测电路设计[J].传感器与微系统,2006,25(8):59-60,73. |
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| 作者姓名： | 石云波 王玲 刘俊 |
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| 作者单位： | 中北大学,电子科学与技术系,电子测试技术国家重点试验室,山西,太原,030051 |
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| 基金项目： | 解放军武器装备预研项目
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山西省自然科学基金 |
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| 摘 要： | 通过对MEMS电容式加速度计的差分电容检测电路优缺点的比较,结合直流充放电检测方法和交流测量方法的优点,设计了微分检测电路,用方波作为载波。该电路由方波信号发生器、微分电路、全波整流电路和滤波电路组成。经试验验证:可检测到10-16F的差分电容,且其非线性度小于±1%FS,可作为MEMS电容式加速度计的后续处理电路。
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| 关 键 词： | 电容式加速度计 差分电容 全波整流 |
| 文章编号： | 1000-9787（2006）08-0059-02 |
| 收稿时间： | 2006-03-22 |
| 修稿时间： | 2006-03-22 |
Detection circuit design of MEMS capacitive accelerometer |
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| SHI Yun-bo,WANG Ling,LIU Jun.Detection circuit design of MEMS capacitive accelerometer[J].Transducer and Microsystem Technology,2006,25(8):59-60,73. |
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| Authors: | SHI Yun-bo WANG Ling LIU Jun |
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| Abstract: | In order to detect the MEMS capacitive accelerometer signal,through compared of the advantage and the disadvantage of the difference capacity detection circuit,combined the direct current charge and discharge and alternating current measurement ways,a differential detection circuit is designed.The carrier wave is rectangular wave,the circuit mainly is composed of rectangular wave occurrence circuit,differential circuit,the whole wave commutate circuit and filter circult.Experiment results show the resolution is 10~(-16) F,the nonlinearity is less than ±1 %FS,the system can be used to detect the capacity accelerometer. |
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| Keywords: | capacitive accelerometer difference capacity the whole wave commutate |
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