| FABRICATION OF DIAMOND TUBES IN BIAS-ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION SYSTEM |
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| 作者姓名： | CHEN Ming MA Yuping XIANG Daohui SUN Fanghong School of Mechanical Engineering Shanghai Jiaotong University Shanghai China |
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| 作者单位： | CHEN Ming MA Yuping XIANG Daohui SUN Fanghong School of Mechanical Engineering，Shanghai Jiaotong University，Shanghai 200240，China |
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| 摘 要： | Deposition of diamond thin films on tungsten wire substrate with the gas mixture of ace- tone and hydrogen by using bias-enhanced hot filament chemical vapor deposition(CVD)with the tantalum wires being optimized arranged is investigated.The self-supported diamond tubes are ob- tained by etching away the tungsten substrates.The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope(SEM)and Raman spectrum.The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD.The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of H_2O_2 and NH_4 OH.There is no residual stress in diamond tube after substrate removal.
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| 关 键 词： | 金刚石试管 热灯丝 化学水蒸气沉积物 高质量 制作工艺 |
FABRICATION OF DIAMOND TUBES IN BIAS-ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION SYSTEM |
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| CHEN Ming MA Yuping XIANG Daohui SUN Fanghong School of Mechanical Engineering,Shanghai Jiaotong University,Shanghai ,China.FABRICATION OF DIAMOND TUBES IN BIAS-ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION SYSTEM[J].Chinese Journal of Mechanical Engineering,2007,20(4):24-26. |
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| Authors: | CHEN Ming MA Yuping XIANG Daohui SUN Fanghong |
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| Affiliation: | School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China |
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| Abstract: | Deposition of diamond thin films on tungsten wire Substrate with the gas mixture of acetone and hydrogen by using bias-enhanced hol filament chemical vapor deposition (CVD) with the tantalum wires being optimized arranged is investigated. The self-supported diamond tubes are obtained by etching away the tungsten Substrates. The quality of the diamond film before and after the removal of Substrates is observed by scanning electron microscope (SEM) and Raman spectrum. The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD. The compressive stress in diamond film formed during the deposition is released after the Substrate etches away by mixture of H202 and NH4OH. There is no residual stress in diamond tube after Substrate removal. |
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| Keywords: | Diamond tube Hot-filament chemical vapor deposition Fabrication High quality SYSTEM CHEMICAL VAPOR DEPOSITION TUBES DIAMOND residual stress tubes compressive stress during Substrates results show good thickness bias hot filament Raman spectrum quality diamond film removal scanning electron microscope |
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