| 场发射结构的有限元模拟 |
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| 引用本文： | 尉伟,王勇,周洪军,裴元吉,蒋道满,范乐.场发射结构的有限元模拟[J].真空电子技术,2003(1):27-29. |
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| 作者姓名： | 尉伟 王勇 周洪军 裴元吉 蒋道满 范乐 |
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| 作者单位： | 中国科学技术大学,国家同步辐射实验室,安徽,合肥,230029 |
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| 摘 要： | 采用ANSYS有限元计算程序，对场致发射体进行模拟计算，初步研究了发射体的几何形状尺寸与其发射特性之间的联系。通过对不同几何尺寸发射体的计算结果的分析，认为发射体的尖端曲率半径及栅极的开口直径是影响发射体发射特性最主要的因素。依据合肥国家同步辐射实验室的LIGA深度光刻技术，给出可行的几何形状。
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| 关 键 词： | 场致发射 几何结构 有限元分析 发射特性 尖端曲率半径 栅极 |
| 文章编号： | 1002-8935(2003)01-0027-03 |
| 修稿时间： | 2002年6月14日 |
The Finite Element Simulation of Structure of Field Emitter Array |
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| WEI Wei,WANG Yong,ZHOU Hong jun,PEI Yuan ji,JIANG Dao man,FAN Le.The Finite Element Simulation of Structure of Field Emitter Array[J].Vacuum Electronics,2003(1):27-29. |
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| Authors: | WEI Wei WANG Yong ZHOU Hong jun PEI Yuan ji JIANG Dao man FAN Le |
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| Abstract: | The ANSYS finite element computation program is used for the simulation calculation of the structure of field emission array.The relationship between the geometrical shape and dimension with its emission characteristics has been preliminarily studied.Through the analysis of the computation results of various geometrical dimensions of the emitter,conclusion is reached that the most important factors upon the emission characteristics of the emitter are the radius of curvature of the emitter tip and the diameter of the gate hole.With the support of the deep lithography technology LIGA in NSRL,Hefei,a number of feasible geometrical figure designs are presented. |
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| Keywords: | Field emission Geometry structure Finite element analysis |
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