Improved mechanical properties of SnO2:F thin film by structural modification |
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| Authors: | Qian Gao Hong Jiang Ming Li Peng Lu Xinyu Lai Xiang Li Yong Liu Chenlu Song Gaorong Han |
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| Affiliation: | 1. State Key Laboratory for Silicon Materials and Center for Electron Microscopy, Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China;2. Special Glass Key Laboratory of Hainan Province, Hainan University, Hainan 570228, China;3. Aviation Industry Corporation of China (HAINAN) Special Glass Material CO., LTD; Special Glass Engineering Technology Research Center of Hainan Province, Hainan 570228, China |
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| Abstract: | This study reports the improvement in the mechanical properties of SnO2:F (FTO) thin films through the modification of the structure and surface morphology. The FTO thin films are deposited on glass substrates by the atmospheric pressure chemical vapor deposition method on an industrial production line. Both the average grain size and the surface roughness were progressively increased by increasing the flow rate of metal organic monobutyltin trichloride (MBTC). The hardness and Young's modulus of the FTO films increased from 9.01 GPa to 15.08 GPa, and from 125.24 GPa to 206.93 GPa, respectively, according to the nanoindenter results. Post-heat treatment at 650 °C for 10 min resulted in a further increase in the hardness and Young's modulus, reaching maximum values of ~15.89 GPa and ~235.9 GPa, respectively. The enhancement in mechanical properties can be attributed to the reduced grain boundaries and the improved structural densification. |
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| Keywords: | Fluorine-doped tin oxide Flow rate Post-heat treatment Mechanical properties |
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