Effect of substrate temperature on the structural,electrical, and optical properties of GZO/ZnO films deposited by radio frequency magnetron sputtering |
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| Authors: | Sun-Kyung Kim Seung-Hong Kim So-Young Kim Jae-Hyun Jeon Tae-Kyung Gong Dong-Hyuk Choi Dong-Il Son Daeil Kim |
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| Affiliation: | 1. School of Materials Science and Engineering, University of Ulsan, Ulsan 680-749, Korea;2. Dongkook Ind. Co., Ltd., Ulsan 683-804, Korea |
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| Abstract: | Ga-doped ZnO (GZO)/ZnO bi-layered films were deposited on glass substrates by radio frequency magnetron sputtering at different substrate temperatures of 100, 200 and 300 °C to investigate the effects of substrate temperature on the structural, electrical, and optical properties of the films. Thicknesses of the GZO and ZnO buffer layer were kept constant at 85 and 15 nm by controlling the deposition times. |
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| Keywords: | D. ZnO GZO Substrate temperature Figure of merit |
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