| PCVD法在模具钢表面沉积Ti(CN)涂层的研究 |
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| 引用本文： | 潘应君,吴新杰,李平生,张细菊.PCVD法在模具钢表面沉积Ti(CN)涂层的研究[J].金属热处理,2003,28(8):7-9. |
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| 作者姓名： | 潘应君 吴新杰 李平生 张细菊 |
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| 作者单位： | 武汉科技大学,材料与冶金学院,湖北,武汉,430081 |
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| 摘 要： | 应用PCVD技术，以金属有机物钛酸丙酯(TPT)代替TiCl4作钛源，在H13模具钢表面沉积Ti(CN)涂层，研究了不同工艺参数对涂层组织和性能的影响。试验结果表明，采用适当的沉积温度、压力及氮气流量，可以在H13钢表面得到以Ti(CN)为主的致密涂层，显著提高模具的表面硬度和使用寿命。该结果在实际应用中取得了良好的效益。
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| 关 键 词： | 等离子体化学气相沉积 Ti（CN）涂层 工模具钢 |
| 文章编号： | 0254-6051(2003)08-0007-03 |
| 修稿时间： | 2002年1月22日 |
Ti(CN) Layer Deposited on Tool Steel by PCVD Technique |
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| PAN Ying-jun,WU Xin-jie,LI Ping-sheng,ZH ANG Xi-ju.Ti(CN) Layer Deposited on Tool Steel by PCVD Technique[J].Heat Treatment of Metals,2003,28(8):7-9. |
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| Authors: | PAN Ying-jun WU Xin-jie LI Ping-sheng ZH ANG Xi-ju |
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| Abstract: | With the organometallic compound propyl titanate TPT instead of TiCl 4 as the source of Ti,a Ti(CN) layer was deposited on the surface of tool steel H13 by PCVD technique.Effects of the process parameters on the structure and microhardness were investigated.The results show that under a appropriate depositing temperature,pressure and flux of nitrogen,a compact layer mostly consisting of Ti(CN) can be formed on the surface of tool steel,which can enhance the microhardness and improve the service life of tool steel significantly. |
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| Keywords: | PCVD Ti(CN) layer tool steels |
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