| Cu层宽度对弯曲型三明治结构FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜巨磁阻抗效应的影响 |
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| 引用本文： | 张亚民,陈吉安,周勇,丁文,王明军,高孝裕,周志敏.Cu层宽度对弯曲型三明治结构FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜巨磁阻抗效应的影响[J].磁性材料及器件,2005,36(1):14-16. |
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| 作者姓名： | 张亚民 陈吉安 周勇 丁文 王明军 高孝裕 周志敏 |
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| 作者单位： | 上海交通大学,微纳米科学技术研究院,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 国家自然科学基金，上海市纳米科技专项基金 |
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| 摘 要： | 采用射频磁控溅射方法和微细加工工艺制备了不同Cu层宽度的弯曲型三明治结构的FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜,在频率1～40MHz下研究了Cu层宽度对多层膜的纵向和横向巨磁阻抗效应的影响.结果表明,弯曲型三明治结构多层膜的巨磁阻抗率随Cu层宽度的变化具有显著的变化,在频率10MHz、磁场12kA/m下,当Cu层宽度为0.4mm时,纵向、横向巨磁阻抗率分别达-57%、-65%.
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| 关 键 词： | FeCuNbCrSiB/Cu/FeCuNbCrSiB三明治薄膜 巨磁阻抗 弯曲型结构 微细加工 |
| 文章编号： | 1001-3830(2005)01-0014-03 |
| 修稿时间： | 2004年9月1日 |
Effects of Cu Layer Width on the Giant Magneto-impedance Effect in Sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB Films With a Meander Line Structure |
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| ZHANG Ya-min,CHEN Ji-an,ZHOU Yong,DING Wen,WANG Ming-jun,GAO Xiao-yu,ZHOU Zhi-min.Effects of Cu Layer Width on the Giant Magneto-impedance Effect in Sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB Films With a Meander Line Structure[J].Journal of Magnetic Materials and Devices,2005,36(1):14-16. |
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| Authors: | ZHANG Ya-min CHEN Ji-an ZHOU Yong DING Wen WANG Ming-jun GAO Xiao-yu ZHOU Zhi-min |
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| Abstract: | Sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB films with different Cu layer width and a meander line structure were prepared on glass substrate by magnetron sputtering and microfabrication technology. Dependence of longitudinal and transversal giant magneto-impedance (GMI) of meander sandwich films were studied on Cu layer width in the frequency range of 1MHz to 40MHz. Experimental result shows that the GMI ratio in the sandwich films varies significantly with Cu layer width, and the maximum longitudinal and transversal GMI of -57% and -65% are obtained at a Cu layer width of 0.4mm and driver field of 12kA/m for a frequency of 10MHz. |
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| Keywords: | FeCuNbCrSiB/Cu/FeCuNbCrSiB sandwich films giant magneto-impedance meander line structure microfabrication |
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