| 磁控反应溅射SnO2薄膜的气敏特性 |
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| 引用本文： | 林秀芬 林永耀. 磁控反应溅射SnO2薄膜的气敏特性[J]. 功能材料, 1993, 24(5): 412-415 |
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| 作者姓名： | 林秀芬 林永耀 |
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| 作者单位： | 福州大学物理系，福州大学物理系，中山大学物理系 福州 350002，福州 350002，广州 510275 |
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| 摘 要： | 报导了对圆形平面靶直流磁控反应溅射生成的SnO_2薄膜的实验测试和对实验结果的分析。研究结果表明,SnO_2薄膜对一些有毒气体或可燃性气体有强的气敏效应和良好的选择性。对SnO_2薄膜的掺杂可大大改变气敏元件的灵敏度、选择性和工作温度。本文还对其工作机理进行探讨及提出可能的解释。
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| 关 键 词： | SnO2薄膜 气敏电导机制 灵敏度 |
Gas-Sensitive SnO_2 Film Deposited by Reactive Sputtering |
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| Lin Xi. Gas-Sensitive SnO_2 Film Deposited by Reactive Sputtering[J]. Journal of Functional Materials, 1993, 24(5): 412-415 |
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| Authors: | Lin Xi |
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| Abstract: | SnO_2 films deposited by magnetic reactive sputtering are tested and the experimental results are discussed. The results indicate that the SnO_2 films have a strong gas-sensitive effect and a good selectivity for some poisonous or combustible gases. The sensitivity, selectivity and working temperature for some gases vary greatly with doping elements in the SnO_2 films. The work mechanism of SnO_2 films is studied and some explainations are proposed. |
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| Keywords: | SnO_2 films gas-sensitive conduct mechanism sensitivity |
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