| 激光干涉测量中的误差分析与补偿 |
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| 引用本文： | 刘君,穆海华,孙业业,周云飞.激光干涉测量中的误差分析与补偿[J].机床与液压,2006(9):181-184. |
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| 作者姓名： | 刘君 穆海华 孙业业 周云飞 |
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| 作者单位： | 华中科技大学,武汉,430074;华中科技大学,武汉,430074;华中科技大学,武汉,430074;华中科技大学,武汉,430074 |
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| 摘 要： | 介绍了双频激光干涉仪的测量原理,从安装和测量等方面深入分析了激光干涉测量所固有的系统误差、阿贝误差及余弦误差、环境误差及延时误差,讨论了各种误差对测量结果的影响,并给出了相应的误差补偿方法。
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| 关 键 词： | 激光干涉测量 误差分析 误差补偿 |
| 文章编号： | 1001-3881(2006)9-181-4 |
| 收稿时间： | 2005-07-19 |
| 修稿时间： | 2005年7月19日 |
Error Analysis and Compensation in Laser Interferometry |
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| LIU Jun,MU Haihua,SUN Yeye,ZHOU Yunfei.Error Analysis and Compensation in Laser Interferometry[J].Machine Tool & Hydraulics,2006(9):181-184. |
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| Authors: | LIU Jun MU Haihua SUN Yeye ZHOU Yunfei |
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| Affiliation: | Engineering Research Center of Numerical Control System Technology, Wuhan 430074, ZHOU Yunfei , Huazhong University of Science and China |
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| Abstract: | The measuring principle of dual-frequency laser interferometer was introduced.On the basis of process of installation and measurement,the inherent error of interferometer,the Abel error and cosine error,the environmental error and the delay error were analyzed.The effect of these errors upon the measurement was discussed.And the compensation methods for the primary error were given. |
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| Keywords: | Laser interferometry Error analysis Error compensation |
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