| 类金刚石薄膜的激光损伤特性测试与分析 |
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| 引用本文： | 谢松林,苏俊宏,徐均琪.类金刚石薄膜的激光损伤特性测试与分析[J].真空科学与技术学报,2006,26(6):533-536. |
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| 作者姓名： | 谢松林 苏俊宏 徐均琪 |
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| 作者单位： | 西安工业大学光电学院,西安,710032 |
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| 摘 要： | 使用脉宽12ns，波长1064nm调Q Nd：YAG激光器对真空阴极电弧沉积（VCAD）法制备的类金刚石薄膜进行抗激光损伤测试，结果表明，VCAD法镀制的薄膜抗激光损伤阈值为0．6J／cm^2。通过对热冲击效应的数值计算，得到了光斑中心的温度场和薄膜表面的应力场分布。研究表明，热应力在类金刚石薄膜的破坏过程中起主导作用，脉冲电弧沉积的DIE薄膜的激光损伤主要源于应力破坏。
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| 关 键 词： | 类金刚石膜 真空阴极电弧沉积 激光损伤 |
| 文章编号： | 1672-7126（2006）06-0533-04 |
| 收稿时间： | 2006-05-19 |
| 修稿时间： | 2006年5月19日 |
Laser Damage Characteristics of Diamond-Like Carbon Film |
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| Xie Songlin,Su Junhong,Xu Junqi.Laser Damage Characteristics of Diamond-Like Carbon Film[J].JOurnal of Vacuum Science and Technology,2006,26(6):533-536. |
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| Authors: | Xie Songlin Su Junhong Xu Junqi |
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| Abstract: | Diamond-like carbon(DLC) films,grown by vacuum cathode arc deposition,were irradiated with Q-switched,pulsed Nd:YAG laser(pulse width of 12 ns and wavelength of 1064 nm).The laser damage was characterized with scanning electron microscopy(SEM).The temperature and stress distribution of the films were evaluated with numerical calculation on the basis of thermal-shock model.The results show that thermal stress dominates laser damage of DLC films.And the threshold of laser damage resistance is found to be 0.6 J/cm~2 |
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| Keywords: | Diamond-like carbon films(DLC) Vacuum cathode arc deposition(VCAD) Laser-damage |
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