| 太阳电池用绒面ZnO-TCO薄膜制备技术及特性的研究进展 |
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| 引用本文： | 陈新亮,薛俊明,赵颖,耿新华.太阳电池用绒面ZnO-TCO薄膜制备技术及特性的研究进展[J].材料导报,2009,23(9). |
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| 作者姓名： | 陈新亮 薛俊明 赵颖 耿新华 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室,南开大学光电信息技术科学教育部重点实验室,天津,300071 |
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| 基金项目： | 国家重点基础研究发展规划(973计划)，天津市科技攻关项目，博士启动基金 |
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| 摘 要： | 概括阐述了薄膜太阳电池用绒面结构ZnO透明导电薄膜(ZnO-TCO)方面的最新研究进展.绒面结构ZnO-TCO薄膜可以提高薄膜太阳电池效率和稳定性并降低生产成本.磁控溅射技术和MOCVD(Lp-MOCVD/LPCVD)技术是制备绒面结构ZnO-TCO薄膜(例如"弹坑"状和"类金字塔"状表面)的主流生长技术,而喷雾热分解技术则是正在开发的非真空法低成本工艺路线.论述了2种主流技术生长ZnO-TCO薄膜的发展历程,并重点讨论了近期关于绒面ZnO-TCO薄膜微观结构、电学以及光学等特性与工艺关系的研究结果.进一步降低成本和实现大面积产业化是绒面ZnO-TCD薄膜拓展应用的发展趋势.
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| 关 键 词： | ZnO薄膜 透明导电氧化物-TCO 绒面结构 薄膜太阳电池 |
Research Progress of Growth Technology and Characteristics for Textured ZnO-TCO Thin Films Applied in Solar Cells |
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| CHEN Xinliang,XUE Junming,ZHAO Ying,GENG Xinhua.Research Progress of Growth Technology and Characteristics for Textured ZnO-TCO Thin Films Applied in Solar Cells[J].Materials Review,2009,23(9). |
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| Authors: | CHEN Xinliang XUE Junming ZHAO Ying GENG Xinhua |
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| Affiliation: | CHEN Xinliang,XUE Junming,ZHAO Ying,GENG Xinhua(Institute of Photo-electronic Thin Film Devices , Technology & Tianjin Key Laboratory of Photo-electronic Thin Film Devices , Technology & Key Laboratory of Opto-electronic Information Science , Technology for Ministry of Education,Nankai University,Tianjin 300071) |
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| Abstract: | In this paper the research progress of growth technology and characteristics for textured ZnO-TCO thin films applied in thin film solar cells are introduced.Textured ZnO-TCO thin films can effectively improve the efficiency and stability of Si-based thin film solar cells and reduce the cost.Magnetron sputtering and metal organic che-mical vapor deposition(MOCVD) are the two main techniques used to grow textured ZnO-TCO thin films(such as crater-like and pyramid-like surface),and spray pyrolysis method is on... |
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| Keywords: | ZnO films transparent conductive oxide texture structure thin film solar cells |
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