| 移动式硅片退火设备的研制 |
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| 引用本文： | 张继光,贾鑫.移动式硅片退火设备的研制[J].电子工业专用设备,2014(6):16-18. |
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| 作者姓名： | 张继光 贾鑫 |
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| 作者单位： | 中国电子科技集团公司第二研究所,山西太原030024 |
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| 摘 要： | 对硅片退火设备的结构及功能进行了大量的改进,介绍了设备的工作原理、结构特点及达到的技术指标。研究了硅片在真空炉中的退火工艺。该设备的研究提升了硅片退火处理的稳定性及工艺性,达到了工艺要求的效果。
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| 关 键 词： | 硅片 退火 真空炉 |
Development of Mobile Silicon Wafer Annealing Equipment |
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| ZHANG jiguang,JIA Xin.Development of Mobile Silicon Wafer Annealing Equipment[J].Equipment for Electronic Products Marufacturing,2014(6):16-18. |
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| Authors: | ZHANG jiguang JIA Xin |
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| Affiliation: | (The second Research Institute of CETC , Taiyuan 030024, China) |
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| Abstract: | Structure and function of silicon w afer annealing equipm ent of a num ber of im provem ents, this paper introduced the w orking principle,structural features and equipm ent specifications. Studied the annealing in vacuum furnace silicon E quipm ent research and im prove stability and process w afer annealing treatm ent,reached the requirem ent of process effect. |
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| Keywords: | Silicon wafer annealing vacuum furnace |
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