| VLSI成品率统计中的缺陷成团效应及统计参数与面积的关系 |
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| 引用本文： | 张钟宣,李志坚. VLSI成品率统计中的缺陷成团效应及统计参数与面积的关系[J]. 半导体学报, 1988, 9(3): 244-254 |
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| 作者姓名： | 张钟宣 李志坚 |
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| 作者单位： | 清华大学微电子研究所 北京(张钟宣)，清华大学微电子研究所 北京(李志坚) |
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| 摘 要： | 本文以负二项分布为基础,在对两个实测统计结果进行分析的基础上,给出了VLSI成品率与缺陷分布统计中有关成团因子与芯片面积关系的模型.在模型的推导中考虑了由于缺陷的成团聚集效应引起的区域之间缺陷分布的相关性这一内在因素.模型与本文给出的两个实测统计结果的一致性很好.
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| 关 键 词： | 成品率模型 缺陷统计 结团 |
Effect of Defect Clustering on VLSI Yield Statistics and Statistical Parameters as a Function of Chip Area |
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| Zhang Zhongxuan/Institute of Microelectronics,Tsinghua University,BeijingLi Zhijian/Institute of Microelectronics,Tsinghua University,Beijing. Effect of Defect Clustering on VLSI Yield Statistics and Statistical Parameters as a Function of Chip Area[J]. Chinese Journal of Semiconductors, 1988, 9(3): 244-254 |
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| Authors: | Zhang Zhongxuan/Institute of Microelectronics Tsinghua University BeijingLi Zhijian/Institute of Microelectronics Tsinghua University Beijing |
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| Abstract: | Based on negative binomial distribution and analysis of two statistical experiment results,a statistical model of the cluster parameter is gven as a function of chip area for VLSI yieldand defect distribution is given. During the model derivation, the correlation between the quad-rats caused by the defect clustering effect is considered.The agreement of the theoretical modelwith the given experiments is satisfactory. |
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| Keywords: | Yeild model Defect statistics Clustering |
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