Change of Crystal Phases and Microstructure of Amorphous Si-C-N Powder by Hot Pressing

An amorphous Si-C-N powder with Y₂O₃ and Al₂O₃ powder as sintering additives was hot-pressed at 1900°C for 120 min in a nitrogen atmosphere. Changes in the crystalline phases and microstructure of the amorphous Si-C-N powder during sintering were investigated by X-ray diffractometry (XRD) and transmission electron microscopy (TEM). The defects at the fracture origins of the sintered bodies after bending tests also were investigated by scanning electron microscopy (SEM) and electron probe microanalysis (EPMA). XRD showed that alpha-Si₃N₄ was formed initially from the amorphous Si-C-N by 1530°C, which then transformed to ß-Si₃N₄ at 1600°C. Also, a slight formation of crystalline SiC occurred during the transformation from alpha- to ß-Si₃N₄, and it increased after the transformation was completed at 1900°C. TEM revealed that many SiC nanoparticles were incorporated into ß-Si₃N₄ grains after the transformation from alpha- to ß-Si₃N₄ at 1600°C. They were located at the triple points of the grain boundaries of ß-Si₃N₄ after continued Si₃N₄ grain growth at 1900°C. Besides the SiC nanoparticles, large agglomerations of carbon or SiC particles of 20-60 µm size were observed by SEM and EPMA at the fracture origins of the sintered bodies after the bending tests.