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1 × 2 MOEMS switch based on silicon-on-insulator andpolymeric waveguides |
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| Authors: | Bakke T. Tigges C.P. Sullivan C.T. |
| Affiliation: | Sandia Nat. Labs., Albuquerque, NM; |
| Abstract: | A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 μs. A crosstalk of -32 dB has been measured |
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