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Approximate solutions to a nonlinear diffusion equation
Authors:J. R. King
Affiliation:(1) Department of Mathematical Sciences, Rensselaer Polytechnique Institute, 12180-3590 Troy, NY, USA
Abstract:Approximate similarity solutions to the porous-medium equation, c1 = nabla · (cm nabla c), are obtained in one and two dimensions. The problems considered arise in the modelling of dopant diffusion in semiconductors, the two-dimentional problems corresponding to diffusion under a mask edge.
Keywords:
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