| 应用SiC反射镜表面改性技术提高TMC光学系统信噪比 |
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| 引用本文： | 陈红,王彤彤,高劲松,巩盾,王笑夷,郑宣鸣,申振峰,张忠玉.应用SiC反射镜表面改性技术提高TMC光学系统信噪比[J].光学精密工程,2009,17(12). |
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| 作者姓名： | 陈红 王彤彤 高劲松 巩盾 王笑夷 郑宣鸣 申振峰 张忠玉 |
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| 作者单位： | 1. 中国科学院,长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,吉林,长春,130033
2. 中国科学院,长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,吉林,长春,130033;中国科学院,研究生院,北京,100049 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 为了消除SiC反射镜的固有缺陷,提高反射式光学系统的信噪比,使用SiC表面改性技术对同轴三反射(TMC)光学系统的SiC反射镜进行了处理.首先,应用等离子体辅助沉积(PIAD)技术沉积了一层Si改性层,接着对改性层进行精密抛光,然后在反射镜表面镀制Ag膜和增强膜,最后获得了表面改性对TMC光学系统信噪比的影响.Wyko轮廓仪测试表明,SiC反射镜的粗糙度R_a由10.42 nm降低到了0.95 nm;镀制高反射膜后,主镜、次镜、三镜及折叠镜在0.5～0.8 μm可见光波段的反射率＞98%.计算结果表明,应用了表面改性技术后TMC反射式光学系统的信噪比提高了5%以上,说明SiC表面改性技术是一种提高TMC光学系统信噪比的有效方法.
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| 关 键 词： | TMC系统 表面改性 SiC反射镜 信噪比 |
Improvement of signal noise ratio of TMC optical system by SiC surface modification technology |
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| CHEN Hong,WANG Tong-tong,GAO Jin-song,GONG Dun,WANG Xiao-yi,ZHENG Xuan-ming,SHEN Zhen-feng,ZHANG Zhong-yu.Improvement of signal noise ratio of TMC optical system by SiC surface modification technology[J].Optics and Precision Engineering,2009,17(12). |
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| Authors: | CHEN Hong WANG Tong-tong GAO Jin-song GONG Dun WANG Xiao-yi ZHENG Xuan-ming SHEN Zhen-feng ZHANG Zhong-yu |
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| Affiliation: | CHEN Hong1,WANG Tong-tong1,GAO Jin-song1,GONG Dun1,2,WANG Xiao-yi1,ZHENG Xuan-ming1,SHEN Zhen-feng1,ZHANG Zhong-yu1(1. Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China,2. Graduate University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | A SiC surface modification technique was applied to a TMC (Three Mirror Coaxis) reflective optical system to eliminate the intrinsic defects of SiC mirrors and to improve the Signal Noise Ratio(SNR) of the reflective optical system. Firstly, a Si layer as a modified coating was deposited on the SiC mirror surface.Then, a fine polish process was employed in the modified layer and the high reflective coatings composed of a silver film and enhancing films were deposited on the mirror surface. Finally, the effe... |
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| Keywords: | TMC system surface modification SiC mirror signal noise ratio |
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