预载电压对力平衡式微硅加速度计性能的影响

在实验中发现,力平衡式加速度计的施力电压变化范围和传统计算中的并不相同。为研究预载电压对加速度计性能指标的影响,重新推导了力发生器的传递函数和静电负刚度等参数的表达式。对参数的分析显示:预载电压直接影响了加速度计的灵敏度、量程和分辨力,但不影响非线性。在综合各种影响的基础上,提出了根据不同应用的要求选取预载电压的方法,并进行了实验验证。

Effects of preload voltage on performance of force-rebalance micro silicon accelerometer

The voltage range on the forcer of a force-rebalance accelerometer in some experiments is different from the one used in traditional calculations.In order to find out the effects of preload voltage on the performance of the accelerometer,the transfer function of the forcer,the equation of the negative electrostatic stiffness and other equations are deduced under the experiment voltage.The results of the parameters analysis show that the sensitiveity,span and resolution of the accelerometer are directly affected by the preload voltage,but the nonlinearity is independent of the preload voltage.Based on all the factors shown above,a method is provided to select the preload voltage according to the requirements of different applications,and this method is validated to be correct by the experiment.