Synthesis of Highly Oriented Lead Zirconate–Lead Titanate Film Using Metallo-organics |
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| Authors: | Shin-ichi Hirano Toshinobu Yogo Koichi Kikuta Yasushi Araki Masahiro Saitoh Satoru Ogasahara |
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| Affiliation: | Department of Applied Chemistry, School of Engineering, Nagoya University, Nagoya 464, Japan |
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| Abstract: | Crack-free Pb(Zr,Ti)O3 (PZT) thin films with preferred orientation were prepared successfully on MgO (100), SrTiO3 (100), and Pt/Ti/SiO2/Si substrates from metal alkoxide solutions. Calcination of precursor films in a H2O─-O2 gas mixture was found to be effective not only for low-temperature crystallization of perovskite PZT, but also for obtaining the preferred orientation of PZT films. Single-phase PZT films with high preferred orientation were synthesized on MgO (100) and Pt/Ti/SiO2/Si substrates at 550° and 600°C for 2 h, respectively. The PZT film on the Pt/Ti/SiO2/Si substrate showed a permittivity of 520, tan δ of 0.03, a remanent polarization of 24 μC/cm2, and a coercive field of 54 kV/cm. |
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