动态被动阀微泵的设计优化和制造

研究的动态被动阀微泵是一种基于微机械技术的振膜型无阀微泵。相对于有阀微泵而言，有更高的工作频率和可靠性，结构简单，加工制造的成本比较低，更容易满足实际应用中的各种要求。讨论了动态被动阀的工作机理，结合流体力学的基本理论与动态被动阀微泵的特点，采用有限单元方法以及相关工具软件ANSYS/FLOTRAN，对整个动态被动阀微泵模型进行了计算、求解和模拟，并根据计算结果及加工工艺特点对其结构进行优化。用基于集成电路制造技术的微细加工工艺分别对动态被动阀微泵的各组成部分进行加工，并组装成完整的动态被动阀微泵。

Cptimized Design and Fabrication of Dynemic Passive Valves Micropump

Dynamic passive valves micropump based on micro machine technology is a kind of membrane drived,valve less micropump which has higher working frequency,high reliability,simple structure,low cost and can easily match many types of requirement in application.The working principle of the dynamic passive micropump is discussed firstly in this paper.Based on the theory of classic hydraulics and the features of dynamic passive valves micropump,the model of the whole dynamic passive valves micropump is built.The finite element analysis method and the related software tool ANSYS/FLOTRAN are used to compute and simulate the model.At last,the dynamic passive valves micropump's structure is designed according to the calculating result and features of micro fabrication technology.Each part of the dynamic passive valves micropump is fabricated and combined together using the micro fabrication technology based on the manufacture of IC.