| 微透镜列阵与红外探测器列阵集成芯片的研究 |
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| 引用本文： | 杜春雷,邱传凯,邓启凌,潘丽,白临波,王永茹.微透镜列阵与红外探测器列阵集成芯片的研究[J].光电工程,2003,30(1):1-4. |
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| 作者姓名： | 杜春雷 邱传凯 邓启凌 潘丽 白临波 王永茹 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点开放实验室,四川,成都,610209 |
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| 摘 要： | 在分析微透镜列阵光聚能原理的基础上,针对背照式256290铂硅红外焦平面探测器列阵 的结构参数,设计了衍射微透镜列阵,使入射光通过硅基底聚焦至探测器的各个光敏面上, 提高光能利用率从而增强探测能力。实验获得了微透镜列阵与红外焦平面集成芯片,并在热成像中取得了良好的结果。
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| 关 键 词： | 微透镜列阵 红外焦平面探测器 集成芯片 热成像 |
| 文章编号： | 1003-501X(2003)01-0001-04 |
| 收稿时间： | 2002/4/11 |
| 修稿时间： | 2002年4月11日 |
Study on the Integrated Chip of Microlens Array with IR Detector Array |
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| DU Chun-lei,QIU Chuan-kai,DENG Qi-ling,PAN Li,BAI Lin-bo,WANG Yong-ru.Study on the Integrated Chip of Microlens Array with IR Detector Array[J].Opto-Electronic Engineering,2003,30(1):1-4. |
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| Authors: | DU Chun-lei QIU Chuan-kai DENG Qi-ling PAN Li BAI Lin-bo WANG Yong-ru |
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| Abstract: | On the basis of analyzing light-gathering principle of microlens array, the diffraction microlens array is designed against back-illumination type 256290 Pt-Si IR focal plane detector array. In this way the incident light can pass through silicon substrate and focus on various sensitive surfaces of detectors. The optical energy utilization ratio can be improved and thus the detection power can also be intensified. The microlens array and IR focal plane integrated chips are obtained in experiments. These chips have achieved good results in thermal imaging. |
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| Keywords: | Microlens array Infrared focal plane array detectors Optical integrated chip Infrared image |
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