| TFT-LCD厂房防微振系统的数值仿真研究 |
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| 引用本文： | 郑佳明,杨光明,李卫,黄文胜,张建润.TFT-LCD厂房防微振系统的数值仿真研究[J].工程建设与设计,2008(10). |
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| 作者姓名： | 郑佳明 杨光明 李卫 黄文胜 张建润 |
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| 作者单位： | 1. 中国电子工程设计院,北京,100840
2. 东南大学,南京,210096 |
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| 摘 要： | 结合有限元理论和多体动力学理论，创新的提出了一种振动系统的精确计算方法，并在TFT厂房设备隔振中进行了工程实践，经随机振动数据采集分析，该方法对于精密设备的隔振设计具有指导意义。
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| 关 键 词： | 微振动 多体动力学 模态综合法 显式动力学 |
Simulation Study on Micro-Vibration-Proof System for TFT-LCD Fab |
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| ZHENG Jia-ming,YANG Guang-min,LI Wei,HUANG Wen-sheng,ZHANG Jian-run.Simulation Study on Micro-Vibration-Proof System for TFT-LCD Fab[J].Construction & Design for Project,2008(10). |
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| Authors: | ZHENG Jia-ming YANG Guang-min LI Wei HUANG Wen-sheng ZHANG Jian-run |
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| Abstract: | An accurate computation method for vibration system was advanced in this paper using the Finite Element and Multi-body Dynamics theory.The design of vibration isolation system for TFT equipment was also analyzed using this computation method.With the analysis of the sampled data the proposed method was proved effective to the vibration isolation system design for precise equipment. |
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| Keywords: | micro-vibration multi-body dynamics modal synthesis method explicit dynamics |
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