| 注塑模具型腔表面阵列微结构的蚀刻技术 |
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| 引用本文： | 黄红光,郭钟宁,杨权. 注塑模具型腔表面阵列微结构的蚀刻技术[J]. 中国机械工程, 2016, 27(17): 2356 |
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| 作者姓名： | 黄红光 郭钟宁 杨权 |
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| 作者单位： | 1.广州汽车集团股份有限公司，广州，5114342.广东工业大学，广州， 510006 |
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| 基金项目： | 国家自然科学基金资助项目(U1134003) |
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| 摘 要： | 设计了一种简单的掩模，并通过控制蚀刻液的喷淋压力进行了平滑阵列微结构研究。研究发现，蚀刻液喷淋压力对微结构的加工形貌有显著影响，蚀刻深度和侧蚀量随蚀刻液喷淋压力增大而增大。研究整合了多次加工和控制喷淋压力的工艺，得到了理想的无棱边棱角、结构均匀的深度渐变型阵列微凸结构。最终在注塑模具表面上加工出宽度为200μm、深度约60μm的无棱边棱角、过渡平滑的阵列微结构。
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| 关 键 词： | 化学蚀刻 表面微阵列结构 蚀刻深度 侧蚀量 二次加工 |
Etching Micromachining of Micro-structure Arrays on Injection Mold Cavity Surface |
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| Huang Hongguang,Guo Zhongning,Yang Quan. Etching Micromachining of Micro-structure Arrays on Injection Mold Cavity Surface[J]. China Mechanical Engineering, 2016, 27(17): 2356 |
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| Authors: | Huang Hongguang Guo Zhongning Yang Quan |
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| Affiliation: | 1.Guangzhou Automoible Group Co.,Ltd.,Guangzhou,5114342.Guangdong University of Technology,Guangzhou,510006 |
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| Abstract: | A simple mask was designed，and smooth rally micro-structure was researched.It is found that spray pressure is of significant influences on the micro-structure feature，the etching depth and undercut will increase per unit time when spay pressure is growing.Different processing method with controlled spay pressure was integrated to machine rally micro-structure，such as smooth rally micro salient and gradual depth rally micro-structure. Finally，a large rally smooth micro-structure with diameter of 200μm， depth of 60μm was machined. |
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| Keywords: | chemical etching rally surface micro-structure etching depth undercut secondary etching |
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