| 纠正套刻畸变 |
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| 引用本文： | 罗仁宇,舒斌. 纠正套刻畸变[J]. 电子工业专用设备, 2006, 35(1): 67-69 |
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| 作者姓名： | 罗仁宇 舒斌 |
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| 作者单位： | 上海讯科微机电有限公司,上海,200233;镇江高等专科学校,江苏,镇江,212009 |
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| 摘 要： | 介绍了调整扫描投影式光刻机畸变的几种方法。畸变是扫描投影式光刻机经常出现的问题,由此而带来的各机台间不能套刻,给生产造成相当的麻烦。简单分析问题的成因及调整方法。
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| 关 键 词： | 扫描投影式光刻机 畸变 温度控制 |
| 文章编号： | 1004-4507(2006)01-0067-03 |
| 收稿时间： | 2005-12-06 |
| 修稿时间： | 2005-12-06 |
Correcting Distortion |
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| LUO Ren-yu,SHU Bin. Correcting Distortion[J]. Equipment for Electronic Products Marufacturing, 2006, 35(1): 67-69 |
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| Authors: | LUO Ren-yu SHU Bin |
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| Affiliation: | 1 .Manufacturing(Shanghai |
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| Abstract: | Essay brief a few kind methods of correcting distortion of Scan Projection Mask Alignment System .Distortion usually appear here. The Alignment System will have incompatibility each other. It will bring trouble on manufacture .We will simple analyze the causes .It is important to correct distortion. |
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| Keywords: | Scan projection mask alignment system Distortion Temperature control |
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