| 光刻伺服盘检测 |
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| 引用本文： | 罗敢,朱永红,张江陵,赫连娜.光刻伺服盘检测[J].武汉理工大学学报,1996(1). |
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| 作者姓名： | 罗敢 朱永红 张江陵 赫连娜 |
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| 作者单位： | 华中理工大学 |
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| 基金项目： | 国家自然科学基金重点项目资助 |
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| 摘 要： | 光刻伺服盘系统作为新一代的磁盘伺服定位技术研究成功,通过检测实验,其质量已达到设计要求.
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| 关 键 词： | 光刻伺服盘 伺服定位 |
Etched Servo Disk Detecting |
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| Luo Can,Zhu Yonghong,Zhang Jiangling,He Lianna..Etched Servo Disk Detecting[J].Journal of Wuhan University of Technology,1996(1). |
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| Authors: | Luo Can Zhu Yonghong Zhang Jiangling He Lianna |
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| Affiliation: | Luo Can Zhu Yonghong Zhang Jiangling He Lianna. |
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| Abstract: | As one king of new-generation magnetic disk servo position technology, the Etched Servo Disk System has been successfully researched. The detecting experiments proved that the quality satisfied our research purpose. |
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| Keywords: | etched servo disk servo posistion |
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