| 面向21世纪的微米、纳米科学与技术 |
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| 引用本文： | 周百令. 面向21世纪的微米、纳米科学与技术[J]. 机械制造与自动化, 1999, 0(4) |
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| 作者姓名： | 周百令 |
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| 作者单位： | 东南大学仪器科学与工程系!210096 |
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| 摘 要： | 本文介绍了微米/纳米科学与技术的含义、意义、国内外发展概况、微米/纳米机械的特征以及它的应用领域,这对开展该领域的研究具有一定的指导意义.
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| 关 键 词： | 微米/纳米机械 微型机电系统 专用集成微型仪器 |
The Micro - nanometer Science and Technique Facing the 21st Century |
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| Zhou Bailing. The Micro - nanometer Science and Technique Facing the 21st Century[J]. Machine Building & Automation, 1999, 0(4) |
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| Authors: | Zhou Bailing |
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| Abstract: | The definition and relevant explanation of micro - nanometer science and technigue are introduced in this paper. Its machinery characteristics, application regions and development are prensented as well . |
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| Keywords: | micro-nanometer machinery microelectron mechanical systems (MEMS) application of specific integrated microinstrument (ASIM) |
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