Study on the method for the reliability test of focused ion beam |
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Authors: | Sang H Lee Hyun-Wook Kang Dong-Woo Cho Wonkyu Moon |
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Affiliation: | (1) Department of Mechanical Engineering, Pohang University of Science and Technology, San 31 Hyoja-dong Nam-gu, Pohang, Kyungbuk, 790-784, South Korea |
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Abstract: | We investigate the reliability of the focused ion beam (FIB) system with the designed evaluation patterns. The reliability
test patterns are composed of three parts, which are the ion beam quality patterns, the ion beam scanning ability patterns
and the stage system patterns. The designed patterns are fabricated with the commercial FIB system, and the common nanometer
scale measurement systems, the atomic force microscopy and the scanning electron microscopy are used to evaluate the fabricated
patterns. The measurement of the absolute length becomes important in the reliability test, and the measurement systems are
calibrated with the standard patterns. The measurement results show the proposed patterns are suitable to measure the characteristics
of FIB system and also other machines which can fabricate nanometer scale and high-aspect-ratio patterns. |
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