| 激光束与半导体材料相互作用机理的研究 |
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| 引用本文： | 徐国昌.激光束与半导体材料相互作用机理的研究[J].广东有色金属学报,1993(3). |
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| 作者姓名： | 徐国昌 |
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| 作者单位： | 东南大学电子工程系 南京210018 |
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| 摘 要： | 讨论了半导体材料四种类型的激光吸收机理,着重研讨了半导体材料激光微细加工中常用的低强度激光辐照下材料表面的光能吸收机制.介绍了一种有效的实验研究方法.
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| 关 键 词： | 吸收系数 载流子 俄歇效应 |
Mechanism Research of Interaction of Laser Radiation with Semiconductor Materials |
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| Xu Guochang.Mechanism Research of Interaction of Laser Radiation with Semiconductor Materials[J].Journal of Guangdong Non-Ferrous Metals,1993(3). |
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| Authors: | Xu Guochang |
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| Affiliation: | Xu Guochang Department of Electron Engineering,Southeast University |
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| Abstract: | Four types of the physical mechanisms of the energy absorbtion for semiconductor materials irradiated by laser beam are described.The discussion is focussed on the mechanism of the energy absorbtion of material surface at low values of laser power density which are frequently used in laser microprocessing. An effective experimental method is presented. |
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| Keywords: | absorbtion coefficient carrier Auger effect |
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