| 化学气相沉积碳化钛的热力学和动力学研究 |
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| 引用本文： | 郭海明 舒武炳. 化学气相沉积碳化钛的热力学和动力学研究[J]. 材料工程, 1998, 0(10): 25-29 |
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| 作者姓名： | 郭海明 舒武炳 |
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| 作者单位： | 西北工业大学材料科学与工程学院 |
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| 摘 要： | 对采用ＴｉＣｌ４－ＣＨ４－Ｈ２反应体系化学气相沉积碳化钛的反应热力学和成核热力学因素进行了分析，并在实验的基础上研究了不同沉积温度下化学气相沉积ＴｉＣ过程的动力学特征，以及在不同的动力学控制机制下气相过饱和度的成核过程对ＴｉＣ涂层的析出形态的影响。在沉积过程中，气相过饱和度和动力学控制机制是控制沉积物的成核过程和析出形态的决定因素。
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| 关 键 词： | 化学气相沉积 碳化钛 热力学 动力学控制机制 |
Thermodynamic and Kinetic Studies on Chemical Vapor Deposition Process of TiC |
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| Guo Haiming Shu Wubing Qiao Shengru Bai Shihong Meng Guowen. Thermodynamic and Kinetic Studies on Chemical Vapor Deposition Process of TiC[J]. Journal of Materials Engineering, 1998, 0(10): 25-29 |
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| Authors: | Guo Haiming Shu Wubing Qiao Shengru Bai Shihong Meng Guowen |
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| Abstract: | Thermodynamic analyses for chemical vapor deposition(CVD) process of TiC from TiCl 4 CH 4 H 2 system was made The kinetic characteristics of TiC CVD process at different deposition temperature, and the effects of the supersaturation of the vapor and the nucleation processes on the deposition morphology of TiC coating in different type of kinetic mechanism have been studied The supersaturation of the vapor and the type of kinetic process involved in the deposition of TiC coating are determining factors for the control of their nucleation and morphology |
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| Keywords: | chemical vapor deposition thermodynamic kinetic mechanism |
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