| 环形波导等离子体源阻抗特性的研究 |
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| 引用本文： | 苏小保,邬钦崇.环形波导等离子体源阻抗特性的研究[J].真空与低温,1997,3(4):192-194. |
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| 作者姓名： | 苏小保 邬钦崇 |
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| 作者单位： | 中国科学院等离子体物理研究所 |
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| 摘 要： | 采用微波三探针研究了环形波导等离子体源阻抗特性随运行参数的变化。分析了微波等离子体源的阻抗特性。该方法有助于微波等离子体特性的研究和实现快速阻抗调配。
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| 关 键 词： | 环形波导等离子体源 微波阻抗 微波三探针 |
CHARACTERIZATION OF THE IMPEDANCE OF ANNULAR WAVEGUIDE PLASMA SOURCE |
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| Su Xiaobao,Wu Qinchong,Wan Yuanxi.CHARACTERIZATION OF THE IMPEDANCE OF ANNULAR WAVEGUIDE PLASMA SOURCE[J].Vacuum and Cryogenics,1997,3(4):192-194. |
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| Authors: | Su Xiaobao Wu Qinchong Wan Yuanxi |
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| Abstract: | A microwave three probe system has been used to study the changes of annular waveguide plasma source impedance with operational parameters.The characterization of mircrowave plasma source impedance has been analyzed.The method is useful to the study of microwave plasma characterization and the realization of fast impedance matching. |
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| Keywords: | Annular waveguide plasma source Microwave impedance Microwave three probes |
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