12对棒还原炉模拟优化分析

12对棒还原炉是目前改良西门子法生产高品质电子级多晶硅的主要炉型,还原炉底盘、喷嘴结构形式、进料曲线是影响还原炉运行的主要因素,对产品产量、质量、电耗等指标影响较大。分析、总结12对棒还原炉的喷嘴布局、曲线以及还原炉内热场、温度场的分布情况,对12对棒的开炉稳定运行、产量提升、质量提升、电耗降低具有指导意义。

Analysis of the simulation optimization of the 12 pairs reactor

12 pairs reactor is the main furnace which is used to producehigh quality electronicgrade polysilicon by improved Siemens process, and base plate, nozzle structure, feed curve of reactor are main factors affecting the operation of the reactor, the impact on product yield, quality and power consumption is relativelygreater. The nozzle layout, curve and the thermal field and temperature field of 12 pair reactor are discussed and analyzed, which canguide the stable operation, ramp up quality improvement and power consumption reduction of 12 pairs reactor.