| 多晶硅生产废气回收处理工艺研究进展 |
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| 作者单位： | ;1.昆明冶研新材料股份有限公司云南省光电子硅材料制备技术企业重点实验室 |
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| 摘 要： | 阐述了多晶硅生产废气主要来源、组分、处理工艺及研究进展,提出了生产高品质多晶硅可选择的废气处理工艺。
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| 关 键 词： | 多晶硅生产 废气回收 研究进展 |
Research Progress of Waste Gas Treatment Process for Polysilicon Production |
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| Affiliation: | ,Kunming Yeyan New-Material Co.,Ltd Enterprises Key Lab of Yunnan Province Optoelectronic Silicon Materials Preparation Technology |
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| Abstract: | This paper presents major sources of wastegases of polysilicon production, composition, treatment process and researches progress, proposes available wastegas treatment processes for the production ofhigh quality polysilicon. |
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| Keywords: | polysilicon production wastegas treatment research progress |
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