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Active Micro‐Actuators for Optical Modulation Based on a Planar Sliding Triboelectric Nanogenerator |
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| Authors: | Chi Zhang Wei Tang Yaokun Pang Changbao Han Zhong Lin Wang |
| Affiliation: | 1. Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing, P.R. China;2. School of Material Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia, United States |
| Abstract: | |
| Keywords: | nanogenerators triboelectric effect actuators piezoelectric bimorphs MEMS optical modulation |