Formation of Si nanocrystals in glass by femtosecond laser micromachining |
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Authors: | Geng Lin Huaihai Pan Ye Dai Fei He Danping Chen Ya Cheng Xiongwei Jiang Long Zhang Jianrong Qiu Quanzhong Zhao |
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Affiliation: | 1. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China;2. Graduate University of the Chinese Academy of Science, Beijing 100049, China;3. Department of Physics, Shanghai University, Shanghai 200444, China;4. State Key Laboratory of luminescence Physics and Chemistry and Institute for Optical Communication Materials, South China University of Technology, Guangzhou 510640, China;1. Instituto de Química Física Rocasolano, IQFR-CSIC, Serrano 119, 28006 Madrid, Spain;2. Institut für Physik, Universität Kassel, Heinrich-Plett-Str. 40, D-34132 Kassel, Germany;1. School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, People’s Republic of China;2. Institute for Optoelectronics and Microsystems (ISOM) and ETSII, Polytechnic University of Madrid (UPM), Madrid 28006, Spain;3. School of Materials Science and Engineering, Tongji University, Shanghai 201804, People’s Republic of China;1. Department of Mechanics, Huazhong University of Science & Technology, 1037 Luoyu Road, Wuhan 430074, China;2. Hubei Key Laboratory of Engineering Structural Analysis and Safety Assessment, Luoyu Road 1037, Wuhan 430074, China;3. Department of Mechanical Engineering and Science, Kyoto University, Nishikyo-ku, Kyoto 615-8540, Japan |
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Abstract: | We report on the precipitation of Si nanocrystals inside a borosilicate glass by using an 800 nm, 250 kHz femtosecond laser irradiation, which was confirmed with X-ray diffraction, Raman spectra and transmission electron microscopy analyses. Refractive index profile reveals that the refractive index of the Si nanocrystals precipitated region increased up to 8.7% in comparison with that of the unirradiated area, leading to a large diffraction efficiency of the fabricated dot structure. Furthermore, the third-order optical nonlinearity of the Si nanocrystals precipitated glass is greatly enhanced based on the Z-scan measurement. These results may find applications for the fabrication diffractive optical devices and optical switches. |
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