Coherent growth and superhardness effect of heterostructure h-TiB2/c-VC nanomultilayers |
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| Authors: | Guanqun Li Yuge Li Geyang Li |
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| Affiliation: | 1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;2. Center of Super-Diamond and Advanced Films (COSDAF), Department of Materials Science and Engineering, City University of Hong Kong, Hong Kong SAR, China;3. College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China;1. Department of Electrical Engineering, National Kaohsiung University of Applied Sciences, Taiwan;2. Medical Devices and Opto-electronics Equipment Department, Metal Industries Research & Development Center, Taiwan;3. Department of Materials Engineering National Ping-Tung University of Science and Technology, Taiwan |
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| Abstract: | TiB2/VC nanomultilayers with different VC layer thicknesses have been prepared by a multi-target magnetron sputtering system. X-ray diffraction, high-resolution transmission electron microscopy and nanoindentation measurements were employed to investigate the microstructure and mechanical properties of these films. The results revealed that a metastable structure of VC has been formed in epitaxial TiB2/VC multilayers with VC layer thickness ≤0.8 nm. Meanwhile, the multilayers exhibited coherent interface between layers resulting in a significantly enhanced hardness of the films, with a maximum value of 43.9 GPa. The stable cubic structure of VC was observed for VC layer thickness ≥1.3 nm, which causes a gradual disruption of the coherent interface of the multilayers, resulting in the quick decrease of hardness. |
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