| 直线电机驱动的磁悬浮平台推力动态解耦控制 |
| |
| 引用本文： | 刘德君,郭庆鼎,翁秀华. 直线电机驱动的磁悬浮平台推力动态解耦控制[J]. 沈阳工业大学学报, 2005, 27(1): 43-47 |
| |
| 作者姓名： | 刘德君 郭庆鼎 翁秀华 |
| |
| 作者单位： | 1. 沈阳工业大学,电气工程学院,沈阳,110023;北华大学,电气工程学院,吉林,吉林,132021
2. 沈阳工业大学,电气工程学院,沈阳,110023 |
| |
| 摘 要： | 介绍一种应用于半导体光刻、微型机械、精密测量、超精密加工、微型装配、纳米技术等领域的新型磁悬浮平台，通过分析其数学模型的特点，采用多变量非线性的逆系统理论，对直线电动机驱动的磁悬浮平台这一多变量、非线性、强耦合的对象通过状态反馈进行推力动态解耦控制，使其成为三个独立的子系统，并用线性理论进行分析和设计.为了改善系统响应的快速性，采用复合控制方案.仿真实验结果表明，这种控制方案有较好的动态和静态特性.
|
| 关 键 词： | 磁悬浮平台 动态解耦控制 状态反馈 直线电机 复合控制 |
| 文章编号： | 1000-1646(2005)01-0043-05 |
| 修稿时间： | 2003-11-27 |
Dynamic thrust decoupling control of linear motor driving magnetic suspension platform |
| |
| LIU De-jun,GUO Qing-ding,WENG Xiu-hua. Dynamic thrust decoupling control of linear motor driving magnetic suspension platform[J]. Journal of Shenyang University of Technology, 2005, 27(1): 43-47 |
| |
| Authors: | LIU De-jun GUO Qing-ding WENG Xiu-hua |
| |
| Affiliation: | LIU De-jun~ |
| |
| Abstract: | A novel magnetic suspension platform has been presented in this paper.The magnetic suspension platform is a micro- electromechanical apparatus,which is widely used in semiconductor processing,circuit board manufacturing,micro-assembling system and so on.A decoupling control approach based on dynamic inversion has been employed for the magnetic suspension platform that is a nonlinear ,multivariable and strong coupling system.Therefore,this scheme makes the complicated system become simple and linear and the linear theory can be used to design.To improve the quick response,the compound control is used.The results of simulation indicate the proposed scheme has better dynamic and static characteristics. |
| |
| Keywords: | magnetic suspension platform dynamic decoupling control state feedback linear motor compound control |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《沈阳工业大学学报》浏览原始摘要信息 |
|
点击此处可从《沈阳工业大学学报》下载全文 |
|
