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Microfabrication of ceramic microreactors
Authors:R Knitter  D Göhring  P Risthaus  J Haußelt
Affiliation:(1) Forschungszentrum Karlsruhe GmbH, Institut für Materialforschung III, Postfach 3640, D-76021 Karlsruhe, Germany e-mail: regina.knitter@imf.fzk.de, DE
Abstract: Ceramic microreactors can be used for applications that cannot be covered by metal or polymer systems, because special material properties, such as high thermal and chemical resistance are required. However, application of ceramic microcomponents often fails due to the time-consuming and costly manufacturing of components with patterning details in the micrometer range. A promising solution to this problem is a rapid prototyping process chain. It offers a fast and precise fabrication of ceramic components down to the micrometer range by combining stereolithography and low-pressure ceramic injection molding. Its fast and flexible tooling allows rapid product development and manufacturing of ceramic components as functional models or in small series. For use in chemical microreaction technology, a modular ceramic microreactor with inner dimensions in the sub-millimeter range has now been developed by means of this process chain.
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