| 深亚微米飞高测量的光电检测系统设计 |
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| 引用本文： | 王亮,李玉和,李庆祥,陈张玮.深亚微米飞高测量的光电检测系统设计[J].电测与仪表,2006,43(3):5-7,19. |
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| 作者姓名： | 王亮 李玉和 李庆祥 陈张玮 |
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| 作者单位： | 清华大学,精密测试技术及仪器国家重点实验室,北京,100084;清华大学,精密测试技术及仪器国家重点实验室,北京,100084;清华大学,精密测试技术及仪器国家重点实验室,北京,100084;清华大学,精密测试技术及仪器国家重点实验室,北京,100084 |
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| 摘 要： | 基于光电传感原理，设计了用于深亚微米飞高测量的光电检测系统，采用前置放大和后级放大电路结合，设计高速高精度数据采集系统，介绍了系统控制交互界面。性能测试结果表明，该光电检测系统线性度、分辨率和动态频率均满足飞高动态测试的要求。
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| 关 键 词： | 高测量 近场光存储 光电检测 微弱信号 |
| 文章编号： | 1001-1390（2006）03-0005-03 |
| 收稿时间： | 2005-10-26 |
| 修稿时间： | 2005-10-26 |
Design of Optoelectronic Detection System for Deep Sub-micron Flying Height Measuring |
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| WANG Liang,LI Yu-he,LI Qing-xiang,CHEN Zhang-wei.Design of Optoelectronic Detection System for Deep Sub-micron Flying Height Measuring[J].Electrical Measurement & Instrumentation,2006,43(3):5-7,19. |
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| Authors: | WANG Liang LI Yu-he LI Qing-xiang CHEN Zhang-wei |
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| Affiliation: | State Key laboratory of Precision Measurement Technology and Instruments, University, Beijing 100084, China |
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| Abstract: | Based on the optoelectronic sense principle,a set of optoelectronic detection system for deep sub-micron flying height measuring is designed, which focuses on the preamplifier and post amplifier. It is a high-speed and high-precision data acquisition system, and the system control interactive interface is introduced. Analysis and experi- ment show that this system has proper parameters on linearity of optoelectronic detection system, measuring resolution and dynamic frequency, and can realize dynamic measuring for the deep sub-micron flying height. |
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| Keywords: | flying height measuring near-field light storage optoelectronic detection feeble signal |
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