| 采用相移干涉原理的平面度测量系统误差分析与校正 |
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| 引用本文： | 何向同,李保庆,许晓慧,马剑强,张晋弘,黄文浩,褚家如.采用相移干涉原理的平面度测量系统误差分析与校正[J].现代制造工程,2010(3). |
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| 作者姓名： | 何向同 李保庆 许晓慧 马剑强 张晋弘 黄文浩 褚家如 |
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| 作者单位： | 1. 中国科学技术大学精密机械与精密仪器系,合肥,230027
2. 江西省电力科学研究院,南昌,330096 |
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| 基金项目： | 安徽省自然科学基金项目 |
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| 摘 要： | 相移干涉法具有非接触、快速和高精度等优点,采用实验室组建的相移干涉系统进行平面度测量时,会产生280nm左右的测量误差。通过对系统误差的分析,发现由扩束器产生的波像差是测量误差的主要来源。为了校正该测量误差,采用Zernike多项式拟合波前像差,然后在平面度测量时扣除该数值拟合结果。实验结果表明,这种误差校正方法可以使λ/4平面反射镜的测量结果从误差校正前的320nm左右减小到120nm左右。
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| 关 键 词： | 平面度 误差分析 误差校正 Zernike多项式 |
The analysis and calibration of systematic errors of phase-shifting interferometry for flatness measurement |
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| HE Xiang-tong,LI Bao-qing,XU Xiao-hui,MA Jian-qiang,ZHANG Jin-hong,HUANG Wen-hao,CHU Jia-ru.The analysis and calibration of systematic errors of phase-shifting interferometry for flatness measurement[J].Modern Manufacturing Engineering,2010(3). |
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| Authors: | HE Xiang-tong LI Bao-qing XU Xiao-hui MA Jian-qiang ZHANG Jin-hong HUANG Wen-hao CHU Jia-ru |
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| Affiliation: | HE Xiang-tong1,LI Bao-qing1,XU Xiao-hui2,MA Jian-qiang1,ZHANG Jin-hong1,HUANG Wen-hao1,CHU Jia-ru1(1 Department of Precision Machinery , Instrumentation,University of Science , Technology of China,Hefei 230027,China,2 Jiangxi Electric Power Research Institute,Nanchang 330096,China) |
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| Abstract: | Phase-Shifting Interferometry(PSI)method has many merits such as non-contact,quickness,high precision.A laboratory-made PSI system has a 280nm measurement error in the flatness detection.After analyzing the measurement errors of the PSI system,the main source limiting the accuracy is wave-front aberration caused by beam expander.To calibrate measurement errors,wave-front aberration is simulated mathematically by using Zernike polynomials and then separated the simulated values from flatness measurement resu... |
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| Keywords: | flatness measurement error analysis the calibration of measurement error Zernike polynomials |
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