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共聚焦激光扫描荧光显微镜扫描系统研制
引用本文:周拥军,陈德强,黄文浩,夏安东. 共聚焦激光扫描荧光显微镜扫描系统研制[J]. 光学精密工程, 2002, 10(6): 582-587
作者姓名:周拥军  陈德强  黄文浩  夏安东
作者单位:1. 中国科学技术大学,精密机械及精密仪器系,安徽,合肥,230026
2. 中国科学技术大学,精密机械及精密仪器系,安徽,合肥,230026;中国科学院化学所,分子反应动力学实验室,北京,100800
基金项目:百人计划"及其创新基金项目资助
摘    要:为适应三维光学微细加工及三维光学信息存储研究的需要,研制了共聚焦激光扫描荧光显微镜的工作台式扫描系统,扫描范围138μm×138μm.工作台采用压电陶瓷驱动器( PZT actuator)驱动的方式来获得高分辨率的位移,采用带柔性铰链的杠杆放大装置来获得较大的位移范围.描述了工作台的工作原理,并对其静态和动态性能进行了测试,实验表明这一扫描系统能很好的应用于共聚焦激光扫描荧光显微镜系统.

关 键 词:共焦显微镜  压电陶瓷驱动器  柔性铰链
文章编号:1004-924X(2002)06-0582-06
收稿时间:2002-04-09
修稿时间:2002-04-09

Development of the scanning system for confocal laser scanning fluorescence microscope
ZHOU Yong-jun,CHEN De-qiang,HUANG Wen-hao,XIA An-dong. Development of the scanning system for confocal laser scanning fluorescence microscope[J]. Optics and Precision Engineering, 2002, 10(6): 582-587
Authors:ZHOU Yong-jun  CHEN De-qiang  HUANG Wen-hao  XIA An-dong
Affiliation:1. Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei, 230026, China;2. Molecular Reaction Dynamics Lab, Institute of Chemistry, Chinese Academy of Sciences, Beijing, 100080, China
Abstract:For adaptation of 3D optical microfabrication and 3D optical data storage, we have developed a stage-scanning system for a confocal laser scanning fluorescence microscope (CLSM) with 138μm x 138μm field of view. The stage employs flexure hinges driven by piezoelectric (PZT) actuators to achieve high positioning accuracy and large scanning area. This paper describes the principle of the stage, and the testing of the static and dynamic properties. The whole system has been testified to work well for confocal laser scanning microscopy.
Keywords:confocal microscope  PZT(piezoelectric) actuator  flexure hinge
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