Deposition of diamond-like films of hydrogenized carbon |
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| Authors: | V. L. Bukhovets I. G. Varshavskaya |
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| Affiliation: | (1) Department of Physics, Faculty of Science and Technology, Universiti Pendidikan Sultan Idris, 35900 Tanjung Malim, Perak, Malaysia;(2) NANO-SciTech Centre, Institute of Science, Universiti Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia;(3) Physics Department, Faculty of Mathematics and Science, Semarang State University, 50229 Semarang, Indonesia;(4) Physics Department, Faculty of Science, Universiti Teknologi Malaysia, 81310 Skudai, Johor, Malaysia;(5) Department of Physics, Faculty of Science, University of Malaya, 50603 Kuala Lumpur, Malaysia;(6) NANO-SciTech Centre, Institute of Science, Universiti Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia; |
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| Abstract: | Diamond-like films of hydrogenized carbon on metal substrates were produced by deposition from methane activated by capacitive electric discharge (AD) within the frequency range of 5–250 Hz and with a relative pulse duration of the charge of 1.5–17. Variations in the charge parameters (frequency, relative pulse duration, current density, methane pressure, the value of gas flow), substrate temperature, and geometry of the vacuum chamber affect the deposition rate, properties, and structures of films within a wide range. Diamondlike films of hydrogenized carbon represented nanocomposite material. The size of sp 2 clusters was 5–6 nm, whereas the sp 3/sp 2 ratio of carbon and the content of bound hydrogen decreased with increasing substrate temperature and current density and decreasing methane pressure. |
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